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Whole Wafer Sample Preparation
 
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Join Us
San Jose Convention Center
San Jose, CA
January 27-29, 2009
Booth 3000
 
Whole Wafer Sample Preparation

Strasbaugh Offers Two Revolutionary Sample Preparation Techniques for Failure Analysis
Introduction
Strasbaugh's WholeWaferSuperThinningTM (WWST) and WholeWaferDeconstructTM (WWD) processes prepare the entire surface of the wafer for backside and frontside failure analysis and yield enhancement.  WWST and WWD is faster, more accurate and more repeatable than conventional sample preparation techniques.  
 
Key Technologies
  • Frontside and backside sample preparation capability
  • Ultra-thin backside preparation process – WholeWaferSuperThinningTM
  • Self-stopping frontside preparation process – WholeWaferDeconstructTM
  • Menu-driven automated process control
  • Advanced carrier technology maintains wafer uniformity and edge exclusion

Applications

  • Oxide
  • Tungsten
  • STI
  • Copper
  • Silicon
  • Flip Chip

Wafer Sizes

  • 100mm to 300mm
  • Notched, flatted, round, and square substrates accommodated
Products

     
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