Strasbaugh's First Prime Wafer Polisher Was Invented in 1970

Introduction Strasbaugh's silicon polishing technology is well suited for a wide variety of applications including silicon prime wafer polishiing, haze removal, SOI polishing, MEMS polishing, and wafer reclaim.  Strasbaugh offers the industry's only fully-automated, wax-mount, silicon wafer polishing system.      Key Technologies Wax-mount or free-wafer mount polishing systems available ViPRR and membrane wafer carriers Defectivity controls Automated, single-wafer, wax mount polishing     Applications 300mm final haze polishing 150mm & 200mm prime wafer final polishing SOI MEMS Wafer reclaim Wafer Sizes 150mm to 300mm Notched, flatted, and round wafers accommodated Products STB P300™ 300mm Silicon Polisher nFinity® (6DZ) 200mm Wax-Mount Silicon Wafer Polisher