subhead2
     
     
 

In This Section:
Home - Technology - Silicon Polishing and Grinding

 
Applications
Technical Papers
Semiconductor CMP and Backgrinding
Silicon Polishing and Grinding
SOI CMP, Grinding and Edge Profiling
Data Storage CMP and Backgrinding
MEMS Polishing and Grinding
LED Grinding and Polishing
R&D CMP and Wafer Grinding
Wafer Reclaim
Whole Wafer Sample Preparation
 
Search 

Join Us
San Jose Convention Center
San Jose, CA
January 27-29, 2009
Booth 3000
 
Silicon Polishing and Grinding

Strasbaugh's First Prime Wafer Polisher Was Invented in 1970
Introduction
Strasbaugh’s offers two silicon polishers, a wax-mount and a free-mount system, designed for high-volume production. Both polishers provide superior process performance, resulting in higher yields.
 
The nFinity Single-Wafer, Wax-Mount Polisher, is the industry’s only fully-automated, wax-mount, silicon wafer polishing system for prime wafer polishing. The nTrepid Silicon Polisher is particularly effective for final haze removal.
 
 
Key nFinity Technologies
  • Innovative wax mount technology
  • Cassette-to-cassette automated wafer handling
  • Single wafer polishing for superior flatness
  • Intuitive touch screen GUI

Key nTrepid Technologies

  • ViPRR and membrane wafer carriers improve TTV and reduce edge exclusion
  • Defectivity controls reduce contamination and improve yield
  • Reduced wafer handling further enhances yield
Applications
  • 300mm final haze polishing
  • 125mm, 150mm, & 200mm prime wafer final polishing
Wafer Sizes
  • 100mm to 300mm
  • Notched, flatted, and round wafers accommodated
Products

     
© 2007 Strasbaugh. 805-541-6424 | Csc@strasbaugh.com  |  Home  |  Site Map |  Print Page |  Email Page
ELEMENTS Interactive marketing agency - Website management and online marketing agency