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Wafer Backgrinding

Strasbaugh Has 20 Years of Experience in Backgrinding for Semiconductor Wafer Manufacturing
Introduction
Strasbaugh was the first to introduce in-feed rotary surface grinding technology, which remains the standard in the industry today.  Combined with force adaptive grinding technology, in-situ thickness measurement, compatibility with a broad range of wafer sizes, and extensive experience grinding hard and brittle materials, Strasbaugh's backgrinding systems are well-suited for a variety of applications including: Semiconductor, GMR/MR Head, MEMS, LED, and R&D backgrinding. 
 
Key Technologies
  • Force Adaptive, In-feed wafer grinding
  • In-situ thickness measurement
  • Automated small wafer handling capability 50mm, 75mm, and 100mm
  • Thin wafer grinding and handling capabilities
  • Extensive experience with hard and brittle materials             
Applications
Strasbaugh has experience dealing with a broad range of applications.  If you do not see your application(s) listed below, please contact us.
  • Silicon
  • GaAs
  • Other Compound Semiconductor
  • Hard Materials:
    • Sapphire
    • SiC
    • AlTiC
  • Consumables R&D
  • Process R&D
Wafer Sizes
  • 50mm to 200mm
  • Notched, flatted, and round wafers and substrates accommodated
Products
  • nTellect® – 200mm production-volume wafer grinder
  • nGenuity® – 150mm low volume wafer grinder, available in manual or automated configuration

     
 
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