Strasbaugh Has Over 20 Years of Experience in CMP for High-Volume Semiconductor Wafer Manufacturing

Introduction Strasbaugh's Semiconductor CMP tools are designed for high reliability, superior process performance and low cost of ownership.  State-of-the-art CMP technologies, such as Saturn and ViPRR wafer carriers and nVision II optical and motor current endpoint enhance process capability and make our products suitable for a broad range of Semiconductor applications.   Key Technologies Independent Turrets ViPRRTM Wafer Carriers Carrier VXTM Wafer Carrier  nVision IITM Optical and Motor Current Endpoint PrecisionTM Pad Conditoner  Nova In-line Metrology Integrated Cleaning Defectivity Controls Applications Tungsten Oxide STI Aluminum Copper Wafer Sizes 75mm to 300mm Notched, flatted, and round wafers accommodated Products STB P300TM 300mm Production CMP nTegrity® (6DS-SP) 200mm Production CMP nHance® (6EG) 300mm R&D CMP nSpireTM (6EC) 200mm R&D CMP