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Taipei World Trade Center
Taipei, Taiwan
Sept 8-10, 2010
Booth 319, CMP Pavilion
 
SOI Grinding and Edge Profiling

Strasbaugh Has 20 Years of Experience in Backgrinding
Introduction
Strasbaugh offers a complete solution for SOI grinding applications with its advanced edge profiling and surface grinding systems.  The nCompass® contours the edge of the wafer to prevent edge chipping and to minimize edge damage during surface grinding.  The nTellect® surface grinder features force adaptive, in-feed grinding technology with in-situ thickness measurement.  Both systems are production proven and provide precise, repeatable results.
 
Key Technologies
  • Force Adaptive, In-feed wafer grinding
  • In-situ thickness measurement
  • Automated small wafer handling capability 50mm, 75mm, and 100mm
  • Thin and thick SOI capability 
  • Unique edge profiling technology            
Applications
  • Thin SOI
  • Thick SOI
Wafer Sizes
  • 100mm to 200mm
  • Notched, flatted, and round wafers accommodated
Products

     
 
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