State-of-the-art Optical Endpoint Detection for CMP

Strasbaugh's nVisionTM Optical Endpoint Detection system pinpoints the precise moment of transition from one layer to another. nVision accurately measures the reflectivity of metals, and features the combination of multiple endpoint capabilities into one system: Optical Spindle motor current Table motor current Downforce Pad temperature nVision Benefits Most advanced, reliable, and accurate form of endpoint available User-friendly Combines multiple technologies (optical, motor current, down force, and pad temperature) Provides improved signal with less noise than conventional optical endpoint systems SmartPad The nVision system's outstanding accuracy is derived from Strasbaugh's patented SmartPadTM technology, which provides a vast performance improvement over other existing optical endpoint systems. SmartPad technology features a light source and sensor embedded in the pad which measure the reflectivity of the surface of the wafer during polishing. As the wafer transitions from one film to another, the reflectivity changes. The inputs are represented graphically in real time, and the desired endpoint can be easily programmed. To request more information on Strasbaugh's nVision Optical Endpoint System, click here.