CMP for 200mm and 300mm Failure Analysis and R&D

Strasbaugh's nHance® CMP system (model 6EG) is an economical tool for CMP research, Whole Wafer DeconstructTM for failure analysis, and low-volume production. Its semi-automatic operations are programmable through a color, touch-screen GUI for repeatable and accurate process control. Featuring advanced technologies, the nHance ViPRRTM Carrier and Hydro-Lift Load StationTM minimize contamination and deliver superior, center-to-edge uniformity. nHance uses the same process control methods, wafer carrier, load station, and pad conditioner as Strasbaugh's fully-automated nTegrity® (6DS-SP) CMP system, easing the transition from development to production. nHance is the affordable solution, providing the benefits of state-of-the-art CMP at a low cost. nHance Benefits Failure Analysis & Yield Enhancement via the nHance's WholeWaferDeconstruct process CMP Process recipes are transferable to Strasbaugh's fully automated 200mm nTegrity system for high-volume production ViPRR carriers reduce edge exclusion, control center-to-edge uniformity, and improve overall performance and reliability Hydro-Lift Load Station and spindle flush eliminate front-side contact and reduce contamination Programmable pad conditioning increases the lifetime of the pad and improves WIWNU operations are programmable through a color, touchscreen GUI Minimal maintenance lowers the cost of ownership Small footprint makes the nHance system convenient for small labs To request more information on Strasbaugh's nHance CMP system, click here.