Improved Process Performance and Higher Yields for IPEC 372 and 472 CMP Systems

Today, technology nodes are changing more rapidly and process requirements are becoming more stringent. Without technology improvements, older CMP equipment will not be able to keep pace. Equipment upgrades have been shown to extend the useful life of mature CMP systems by enabling them to meet the latest process requirements, which improves production efficiency, postpones the need to recapitalize fab equipment and lowers overall production costs. With over 400 ViPRRTM carriers in production on Strasbaugh planarizers, the carrier upgrades have been proven to enhance process performance and to improve yields. Strasbaugh's ViPRRTM carriers are now available for upgrade to IPEC 372 and 472 CMP platforms. Benefits Pad pre-compression reduces edge exclusion to 3mm or less Low friction gimbal improves CTE uniformity Includes Zone Back Pressure for uniformity control Reduces local non-uniformities Simple, robust design Retrofit requires no software changes To request more information on Strasbaugh's IPEC-compatible ViPRR wafer carrier, click here.