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STB P300 CMP System
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Moscone Center
San Francisco, CA
July 13-15, 2010
Booth 2107, South Hall
 
STB P300 CMP System

A Better Choice in CMP
 
The STB P300 is the semiconductor industry’s first CMP system designed to incorporate Next Generation Factory principles.  It combines the greatest production and process flexibility of any CMP machine on the market with the most advanced CMP technologies available.  With industry-leading process performance, integrated state-of-the art wafer cleaning, low cost of ownership, and a capital cost of approximately 50% of the competition, the P300 offers device makers a new and better choice in CMP.
 
STB P300 Benefits
  • Greatest Production and Process Flexibility
  • Built for High Volume Production
  • Small Lot, High Mix Capability
  • Ultra Low Downforce Process Capability
  • Reliable
  • Small Footprint
  • Reduces Setup Time and FWD
  • Low Cost of Ownership
  • Low Capital Cost
  • Handles 150mm, 200mm, or 300mm Wafers

STB P300 Technologies

  • Independent Turrets
  • Advanced Wafer Carriers
  • Optical Endpoint Detection 
  • Ultra-Precise Pad Conditioning
  • Industry-Proven, Integrated Cleaning

To request more information on Strasbaugh’s P300 CMP system, click here

     
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