With common-sense design and distinct technical advantages, Strasbaugh’s Hydro Lift Load Station offers benefits that boost the bottom line. Increased reliability Decreased defects Reduced edge exclusion Precise wafer centering Robust design Decreased maintenance UNIQUE LOAD AND UNLOAD STATIONS PROVIDE PRECISE HANDLING Strasbaugh's innovative Hydro Lift Load Station is composed of load and unload stations on a single rotating carousel. The load stations provide a precise means of accurately centering pre-polished wafers into carriers. The unload stations not only accept the wafers, but also process them through a pre-clean rinse. Together, the Hydro Lift load and unload stations provide better reliability, decreased defects and reduced edge exclusion. DESIGN SIMPLICITY DELIVERS HIGHER RELIABILITY Strasbaugh's Hydro Lift Load Station features simple, efficient operation. Sensibly designed with durable materials and just one actuator (superfluous air cylinders and electronic sensors might otherwise require ongoing maintenance or incur damage from slurries,) the Hydro Lift Load Station retains precise functionality with excellent results. Strasbaugh's elegant design does not rely heavily on software, valves, sensors or actuated parts, ensuring a greater MTBF with diminished needs for maintenance. Precise Positioning Reduces Edge Exclusion and Decreases Defects The Hydro Lift Load Station features an innovative centering device that reliably delivers pre-polished wafers. Even with 200.5mm retaining ring diameters, this patent-pending centering device ensures precise centering of wafers. At the unload station, post-polished wafers float on a unique 3-point hovering system powered by nozzles of streaming DI water that rotate the wafers as they are rinsed on each side. This distinctive design prevents the wafers from front-side contact after polishing, minimizing edge exclusion and further reducing particle contamination. BUILT-IN FLEXIBILITY Originally designed for Strasbaugh's nTegrity (6DS-SP) CMP Systems, customer demand has spurred development of adaptations for the 300mm nHance and 200mm nAble systems. Available today for 100, 150, 200 and 300mm wafers, Strasbaugh's Hydro Lift Load Station is the CMP industry's most precise, reliable load station. To request more information on Strasbaugh's Hydro Lift Load Station, click here.